Colombia LPCVD Equipment

♦ Relevant Industries: Integrated Circuits, Advanced Packaging ♦Suitable for Processing: Silicon (Si), Silicon Carbide (SiC) ♦ Wafer Size: 12/8 inch

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ColombiaLPCVD Equipment

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Product Description

Product Applications:

♦Applicable Fields: Integrated Circuits, Advanced Packaging Relevant Industries: Integrated Circuits, Advanced Packaging

♦Applicable Materials: Si, SiC – Suitable for Processing: Silicon (Si), Silicon Carbide (SiC)

♦Wafer Size: 12/8 inches

♦Applicable Processes: Silicon Nitride (SiN) deposition, Polysilicon (Poly-Si / U-Poly / D-Poly) deposition, Silicon Dioxide (TEOS) deposition, HTO, and more.

Technical Indicators:

♦ Process Temperature Range: 300°C–1000°C

♦ Batch Size: 100–125 pieces Batch Capacity: 100–125 pcs

ColombiaSiC High-Temperature Oxidation Furnace

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Address: Jinan, Huaiyin District, Jinan City, Jinan Wide Forbidden Belt Semiconductor Industrial Park

Telephone:+86 0531-8790-5298

Mailbox:liguan@liguanchina.com