Marshall Islands ALD Equipment

♦Relevant Industries: Integrated Circuits, Advanced Packaging ♦ Applicable material: Si ♦ Wafer size: 12/8 inches ♦ Applicable processes: Silicon Nitride (SiN)、 Silicon Dioxide（SiO2）, and other film layers

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Product Description

Product Applications:

♦Relevant Industries: Integrated Circuits, Advanced Packaging

♦ Applicable material: Si

♦ Wafer size: 12/8 inches

♦ Applicable processes: Silicon Nitride (SiN)、 Silicon Dioxide（SiO2）, and other film layers

Technical Indicators:

♦Process Temperature Range: 100°C–350°C

♦Batch Capacity: 50-100 pcs

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Address: Jinan, Huaiyin District, Jinan City, Jinan Wide Forbidden Belt Semiconductor Industrial Park

Telephone:+86 0531-8790-5298

Mailbox:liguan@liguanchina.com