Shandong Liguan Microelectronics Equipment

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croatia ALD Equipment

♦Relevant Industries: Integrated Circuits, Advanced Packaging ♦ Applicable material: Si ♦ Wafer size: 12/8 inches ♦ Applicable processes: Silicon Nitride (SiN)、 Silicon Dioxide(SiO2), and other film layers

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croatiaALD equipment

Product Description

 

Product Applications:

♦Relevant Industries: Integrated Circuits, Advanced Packaging

♦ Applicable material: Si

♦ Wafer size: 12/8 inches

♦ Applicable processes: Silicon Nitride (SiN)、 Silicon Dioxide(SiO2), and other film layers

  

Technical Indicators:

♦Process Temperature Range: 100°C–350°C

♦Batch Capacity: 50-100 pcs