Shandong Liguan Microelectronics Equipment

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LPCVD Horizontal Furnace

LPCVD equipment is one of the important equipments for semiconductor integrated circuit manufacturing.which is mainly used for the growth of LP-POLY,LP-DPOLY,LP-SiN,LP-TEOS thin films.

LPCVD Vertical Furnace

LPCVD equipment is one of the important equipments for semiconductor integrated circuit manufacturing,which is mainly used for the growth of LP-POLY,LP-DPOLY,LP-SiN,LP-TEOS thin films.

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