Shandong Liguan Microelectronics Equipment

Product display


Graphene Film CVD Equipment

◆ The system is a complete graphene preparation system, including hardware and software ◆ Working in a normal pressure atmosphere or vacuum conditions, by controlling the growth process, both hexagonal graphene single crystals and petal-shaped graphene single crystals can be grown

Graphene Roll-to-roll Equipment

♦Graphene film industrialization equipment ♦Wide roll-to-roll continuous growth ♦APC system: vacuum butterfly valve automatic control ♦MFC control of carbon source and other process gases ♦Automatic control of film preparation process ♦three-chamber structure

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