Product classification
Contact Information
Address: Jinan, Huaiyin District, Jinan City, Jinan Wide Forbidden Belt Semiconductor Industrial Park
Telephone:+86-15562450816
Mailbox:liguan1218@163.com
HVPE Epitaxy Furnace - Vertical
Classification:
Ga2O3 single crystal growth and epitaxy equipment
HVPE Epitaxy Furnace
Summary:
Key words:
HVPE Epitaxy Furnace - Vertical
Product Introduction:
This device is mainly used for epitaxial growth of gallium oxide (Ga2O3), aluminum nitride (AIN), and other materials.
Provide 2 inches validation process.
Product Characteristics:
♦Substrate: 2-8 inches
♦Quantity: 1 pcs/multiple pcs
♦Temperature control precision: High precision, good stability in temperature zone.
♦Structure: Vertical/horizontal optional, meets the needs of various sizes of substrates and various operation modes.
♦Security protection function: Hardware protection + software interlock.
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