Shandong Liguan Microelectronics Equipment

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LPCVD Equipment

♦ **Applicable Fields:** Integrated Circuits, Advanced Packaging Relevant Industries: Integrated Circuits, Advanced Packaging ♦ **Applicable Materials:** Silicon (Si), Silicon Carbide (SiC) Suitable for Processing: Silicon (Si), Silicon Carbide (SiC) ♦ **Wafer Sizes:** 12/8/6 inches Wafer Size: 12/8/6 inch ♦ **Applicable Processes:** Silicon Nitride (SiN) Deposition, Polysilicon (Poly-Si / U-Poly / D-Poly) Deposition, Silicon Dioxide (TEOS) Deposition, HTO, and more

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