Product classification
Contact Information
Address: Jinan, Huaiyin District, Jinan City, Jinan Wide Forbidden Belt Semiconductor Industrial Park
Telephone:+86-15562450816
Mailbox:liguan1218@163.com
LPCVD Equipment
Classification:
Vertical Furnace Tube Equipment
Product Showcase
Semiconductor chip equipment
LPCVD Equipment
Summary:
Key words:
LPCVD Equipment
Product Applications:
♦Applicable Fields: Integrated Circuits, Advanced Packaging Relevant Industries: Integrated Circuits, Advanced Packaging
♦Applicable Materials: Si, SiC – Suitable for Processing: Silicon (Si), Silicon Carbide (SiC)
♦Wafer Size: 12/8 inches
♦Applicable Processes: Silicon Nitride (SiN) deposition, Polysilicon (Poly-Si / U-Poly / D-Poly) deposition, Silicon Dioxide (TEOS) deposition, HTO, and more.
Technical Indicators:
♦ Process Temperature Range: 300°C–1000°C
♦ Batch Size: 100–125 pieces Batch Capacity: 100–125 pcs
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