Semiconductor process equipment

• Oxidation/Diffusion/Annealing

  • Vertical furnace

  • SiC High Temperature Oxidation Furnace

  • SiC High-Temperature Annealing Furnace

  • Horizontal furnace

• CVD equipment

  • Vertical LPCVD

  • Horizontal LPCVD

Compound crystal equipment

• SiC single crystal growth equipment

  • PVT method long crystal furnace

  • Liquid Phase Method Crystal Growth Furnace

  • Seed crystal bonding equipment

• GaN single crystal growth equipment

• Ga2O3 single crystal growth and epitaxy equipment

  • Mold Method Crystal Growth Furnace

  • Vertical Bridgman Method (VB) Furnace (Non-Iridium Technology)

  • HVPE Epitaxy Furnace

• Diamond single crystal growth equipment

• GaAs / InP single crystal growth equipment