Shandong Liguan Microelectronics Equipment

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Horizontal furnace

This device is one of the important process equipment in the front-end process of semiconductor production lines, used for oxidation, diffusion, annealing, alloying, and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, and optoelectronic devices. Oxidation process: Mainly used for the preparation processes of various oxide medium layers such as initial oxide layer, gate oxide layer, and field oxide layer.

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