Shandong Liguan Microelectronics Equipment

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HVPE Epitaxial Furnace - Horizontal

This equipment is mainly Used for the growth of galiumnitride(GaN)single crystal;Used for the epitaxial  growth of gallium oxide (Ga2O3),aluminum nitride(AIN), indium phosphide(InP)and gallium arsenide(GaAs).

Vertical Bridgman Process (VB) Furnace

This equipment is mainly used for single crystal growth of Gallium Oxide (Ga2O3) (non-iridium method), where the raw material is placed in a vertical crucible and then directionally solidified from the tip of the crucible through a pre-set temperature gradient zone. Single crystals are grown by slow cooling.

MPCVD equipment

The equipment is mainly used forthe preparation of single crystal diamond.It can excite the plasma cluster with high stability, thus ensuring the continuity of single crystal growth and providing a strong guarantee for the synthesis of large-size single crystal diamond.

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