Product classification

Contact Information

Address: Jinan, Huaiyin District, Jinan City, Jinan Wide Forbidden Belt Semiconductor Industrial Park

MPCVD equipment

Classification:

Diamond single crystal growth equipment

Summary:

The equipment is mainly used forthe preparation of single crystal diamond.It can excite the plasma cluster with high stability, thus ensuring the continuity of single crystal growth and providing a strong guarantee for the synthesis of large-size single crystal diamond.

Key words:

MPCVD equipment

Product Introduction：

♦ The equipment is mainly used forthe preparation of single crystal diamond.It can excite the plasma cluster with high stability, thus ensuring the continuity of single crystal growth and providing a strong guarantee for the synthesis of large-size single crystal diamond.

Product Characteristics：

♦ Temperature process range: 300-1500C

♦ Gas path system: 6 channels

♦ Microwave power: 6-15Kw continuously adjustable

♦ Ripple:≤1%

♦ Microwaveleakagevalue:<5Mw/cm²

♦ Deposition area:≥100 mm

♦ Limit vacuum:≤10Pa

♦ Pressure range: 5-300 Torr

♦ Power stability:<2%

♦ Microwave frequency:2.45GHz ± 50MHz

♦ Discharge area:≥100mm