Product classification

Contact Information

Address: Jinan, Huaiyin District, Jinan City, Jinan Wide Forbidden Belt Semiconductor Industrial Park

Vacuum Annealing Equipment

Classification:

First generation semiconductor process equipment

Summary:

◆ Mainly used for annealing and sintering of semiconductor devices and other processes, can be vacuum, gas protection, etc. ♦ The equipment structure is novel, easy to operate ◆ Multiple processes can be completed on one device

Key words:

Vacuum Annealing

Vacuum Annealing Equipment

Product Introduction：

♦ Mainly used for annealing and sintering of semiconductor devices, and can be protected by vacuum and gas

♦ The equipment has novel structure and convenient operation

♦ Multiple process flows can be completed on one equipment

Product Characteristics：

♦ High degree of automation

♦ Adopting imported temperature controller, the temperature controllercan be controlled to run, stop andmaintain, and flexibly control the process temperature change

♦ The electrical components are imported well-known brand components, which ensures good stability andreliability of the equipment

♦ The whole processing process is controlled by industrial computer intelligently and automatically, which canrealize the functions of whole process monitoring,tracking and self-diagnosis, simulate and display the workingstate of equipment, and control the heating and cooling speed

Technical Indicators:

Maximum temperature: 200-800 ℃	Constant temperature zone: 1200mm (length can be customized)
Temperature control accuracy: ± 1 ℃	Vacuum chamber: 2-3 stations
Vacuum degree: ≤ 510^-4pa	Heating rate: 15 ℃/min
Atmosphere protection: quick opening safety valve, etc