Product classification
Contact Information
Address: Jinan, Huaiyin District, Jinan City, Jinan Wide Forbidden Belt Semiconductor Industrial Park
Telephone:+86-0531-8790-5298
Mailbox:liguan@liguanchina.com
ALD equipment
Classification:
Product Showcase
Semiconductor chip equipment
Vertical Furnace Tube Equipment
ALD equipment
Summary:
Key words:
ALD equipment
Product Applications:
♦ Applicable fields: Integrated circuits, advanced packaging
Relevant Industries: Integrated Circuits, Advanced Packaging
♦ Applicable material: Si
Suitable for Processing: Silicon (Si)
♦ Wafer size: 12/8 inches
Wafer Size: 12/8 inch
♦ Applicable processes: Silicon nitride (SiN), silicon dioxide (SiO₂) 2 ) Deposition of film layers, etc.
Silicon Nitride (SiN), Silicon Dioxide (SiO₂) 2 ), and other film layers
Technical Indicators:
♦ Process temperature range: 100°C–350°C
Process Temperature Range: 100°C–350°C
♦ Batch size: 50–100 pieces
Batch Capacity: 50-100 pcs
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