Shandong Liguan Microelectronics Equipment

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SiC High Temperature Annealing

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SiC High Temperature Annealing Equipment


♦It is specially used for ion activation and annealing treatment of silicon carbon compound (SiC), which can realize the active process of SiC wafer in high temperature vacuum environment. ♦The equipment is suitable for ion activation and annealing processes in the manufacture of SiC-based power devices. ♦The heating chamber and the process chamber are independently sealed and designed to provide the cleanliness of the process chamber.

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