Product classification
Contact Information
Address: Jinan, Huaiyin District, Jinan City, Jinan Wide Forbidden Belt Semiconductor Industrial Park
Telephone:+86-15562450816
Mailbox:liguan1218@163.com
horizontal type Furnace
Classification:
Diffusion/oxidation/annealing
Summary:
Key words:
horizontal type Furnace
Product Introduction：
This equipment is one of the important process equipments in the front process of semiconductor production line,which is used for diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices.
Product Characteristics：
♦High cleanliness: including materials, process environment, etc
♦ High precision: including furnace temperature, inlet flow, exhaust pressure, motion control, etc
♦ High safety: including gas leakage detection, airflow detection, man-machine interlocking, etc
Technical Indicators：
♦Wafer size: 6/8/12 inch
♦Process temperature range: 300°C-1250°C
♦Batch capacity: 100-150 pcs
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SiC High Temperature Oxidation Furnace