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Address: Jinan Wide Band-gap Semiconductor Industrial Park, Huaiyin District, Jinan City
Telephone:+86-15562450816
Mailbox:liguan1218@163.com
One of the important equipment for semiconductor integrated circuit manufacturing, mainly used for POLY, D-POLY, SiN, LP-TEOS; the vertical LPCVD adopts a bell jar structure, designed with a nested cavity mechanical hand transfer component and a boat rotation component, featuring advantages such as small footprint, high film uniformity, and high process stability.