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Address: Jinan Wide Band-gap Semiconductor Industrial Park, Huaiyin District, Jinan City
Telephone:+86-15562450816
Mailbox:liguan1218@163.com
This device is one of the important process equipment in the front-end process of semiconductor production lines, used for processes such as phosphorus/boron diffusion, oxidation, annealing, alloying, and sintering in industries like large-scale integrated circuits, discrete devices, power electronics, and optoelectronic devices; it is mainly used for the preparation processes of various oxide medium layers such as initial oxide layer, gate oxide layer, and field oxide layer.