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Address: Jinan Wide Band-gap Semiconductor Industrial Park, Huaiyin District, Jinan City
Telephone:+86-15562450816
Mailbox:liguan1218@163.com
One of the important equipment for semiconductor integrated circuit manufacturing, mainly used for POLY, D-POLY, SiN, LP-TEOS; the vertical LPCVD adopts a bell jar structure, designed with a nested cavity mechanical hand transfer component and a boat rotation component, featuring advantages such as small footprint, high film uniformity, and high process stability.
LPCVD equipment is one of the important devices in semiconductor integrated circuit manufacturing, mainly used for POLY, D-POLY, SiN, LP-TEOS.