Product classification
Contact Information
Address: Jinan, Huaiyin District, Jinan City, Jinan Wide Forbidden Belt Semiconductor Industrial Park
Telephone:+86-15562450816
Mailbox:liguan1218@163.com
MPCVD Crystal Growth Furnace
Classification:
Diamond single crystal growth equipment
Summary:
Key words:
MPCVD Crystal Growth Furnace
Product Introduction:
This device is mainly used for the preparation of single crystal diamond. It can excite a plasma cluster with high stability, thus ensuring the continuity of single crystal growth and providing a strong guarantee for the synthesis of large-size single crystal diamond.
The equipment is mainly used for the preparation of single crystal diamond. It can excite the plasma cluster with high stability, thus ensuring the continuity of single crystal growth and providing a strong guarantee for the synthesis of large-size single crystal diamond.
Product Characteristics:
♦ Temperature process range: 300-1500C
♦ Gas path system: 6 channels
♦ Microwave power: 6-12Kw continuously adjustable
♦ Ripple:≤1%
♦ Microwave leakage value:<5Mw/cm²
♦ Deposition area:≥100 mm
♦ Limit vacuum:≤10Pa
♦ Pressure range: 5-300 Torr
♦ Power stability:<2%
♦ Microwave frequency:2.45GHz ± 50MHz
♦ Discharge area:≥100mm
♦ Growth rate:>10um
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