Shandong Liguan Microelectronics Equipment

Product display


SiC seed crystal bonding equipment

This device bonds SiC seed crystals to graphite using an organic adhesive. Improving the bonding quality of seed crystals is the primary prerequisite to ensure the growth of high quality SiC crystals.

PVT method long crystal furnace - resistance furnace

This equipment is mainly used for the single crystal growth of silicon carbide (SiC) and aluminum nitride (AIN).

PVT method long crystal furnace - induction furnace

This equipment is mainly used for the single crystal growth of silicon carbide (SiC) and aluminum nitride (AIN).

Liquid Phase Method Crystal Growth Furnace

This equipment is mainly used for the single crystal growth of silicon carbide (SiC). The liquid phase method can achieve the growth of SiC single crystals at much lower temperatures (<2000℃), which theoretically makes it easier to obtain high-quality single crystals. The temperature gradient is utilized as a growth driver to achieve crystal growth.

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